A new regime for operating capacitive micromachined...

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 2003 / 09 Vol. 50; Iss. 9

A new regime for operating capacitive micromachined ultrasonic transducers

Bayram, B., Haeggstrom, E., Yaralioglu, G.G., Khuri-Yakub, B.T.
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Volume:
50
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DOI:
10.1109/TUFFC.2003.1235329
Date:
September, 2003
File:
PDF, 834 KB
english, 2003
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