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Design aspects of 13.56MHz, 1kW, CW-RF oscillator for plasma production
Kumar, Sunil, Kadia, Bhavesh, Singh, Raj, Varia, Atul, Srinivas, Y S S, Kulkarni, S V, Group, Icrh-RfVolume:
208
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/208/1/012012
Date:
February, 2010
File:
PDF, 427 KB
english, 2010