SPIE Proceedings [SPIE MOEMS-MEMS 2007 Micro and Nanofabrication - San Jose, CA (Saturday 20 January 2007)] MEMS/MOEMS Components and Their Applications IV - Fabrication of comb-drive micro-actuators based on UV lithography of SU-8 and electroless plating technique
Dai, Wen, Wang, Wanjun, Tadigadapa, Srinivas A., Ghodssi, Reza, Henning, Albert K.Volume:
6464
Year:
2007
Language:
english
DOI:
10.1117/12.705333
File:
PDF, 471 KB
english, 2007