SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Micromachined Devices and Components V - MEMS fixtures for handling and assembly of microparts
Tahhan, Isam N., Zhuang, Yan, Boehringer, Karl F., Pister, Kristofer S. J., Goldberg, Ken, French, Patrick J., Peeters, EricVolume:
3876
Year:
1999
Language:
english
DOI:
10.1117/12.360488
File:
PDF, 1.00 MB
english, 1999