Effect of ion bombardment on low-temperature growth of TiO2...

Surface and Coatings Technology 2013 / 9 Vol. 231

Effect of ion bombardment on low-temperature growth of TiO2 thin films in DC reactive sputtering with two sputtering sources

Yasuda, Yoji, Tobisaka, Masayuki, Kamikuri, Kento, Hoshi, Yoichi
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Volume:
231
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2012.01.003
Date:
September, 2013
File:
PDF, 1.44 MB
english, 2013
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