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Laser assisted direct write process with novel beam profiles
Shang, Shuo, Wellburn, Dan, Fearon, Eamonn, Yan, Shilian, Edwardson, Stuart, Dearden, G., Watkins, K.G.Volume:
51
Language:
english
Journal:
Optics and Lasers in Engineering
DOI:
10.1016/j.optlaseng.2012.11.005
Date:
May, 2013
File:
PDF, 806 KB
english, 2013