[IEEE 2009 IEEE Sensors - Christchurch, New Zealand (2009.10.25-2009.10.28)] 2009 IEEE Sensors - A micromachined resonant pressure sensor with DETFs resonator and differential structure
Wang, Junbo, Chen, Deyong, Liu, Lei, Wu, ZhengweiYear:
2009
Language:
english
DOI:
10.1109/ICSENS.2009.5398404
File:
PDF, 560 KB
english, 2009