SPIE Proceedings [SPIE Photonics Asia 2010 - Beijing, China (Monday 18 October 2010)] Advanced Sensor Systems and Applications IV - A compact micromachined interferometric accelerometer based on the diffraction grating
Zhao, Shuangshuang, Zhou, Qiaofen, Hou, Changlun, Bai, Jian, Yang, Guoguang, Culshaw, Brian, Liao, Yanbiao, Wang, Anbo, Bao, Xiaoyi, Fan, Xudong, Zhang, LinVolume:
7853
Year:
2010
Language:
english
DOI:
10.1117/12.869399
File:
PDF, 1.10 MB
english, 2010