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Effect of sputtering power and annealing temperature on the properties of indium tin oxide thin films prepared from radio frequency sputtering using powder target
Guisheng Zhu, Zupei YangVolume:
24
Language:
english
DOI:
10.1007/s10854-013-1298-8
Date:
October, 2013
File:
PDF, 856 KB
english, 2013