Effect of sputtering power and annealing temperature on the...

Effect of sputtering power and annealing temperature on the properties of indium tin oxide thin films prepared from radio frequency sputtering using powder target

Guisheng Zhu, Zupei Yang
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Volume:
24
Language:
english
DOI:
10.1007/s10854-013-1298-8
Date:
October, 2013
File:
PDF, 856 KB
english, 2013
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