Formation of Highly Ordered Silicon Nanowires by a High-Speed Deep Etching
Poudineh, Mahla, Sanaee, Zeinab, Gholizadeh, Azam, Soleimani, Samaneh, Mohajerzadeh, ShamsoddinVolume:
12
Language:
english
Journal:
IEEE Transactions on Nanotechnology
DOI:
10.1109/TNANO.2013.2269479
Date:
September, 2013
File:
PDF, 1.60 MB
english, 2013