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Ion Energy Distribution in a Radiofrequency C4F8
T. Chevolleau, W. Fukarek, W. MöllerVolume:
41
Year:
2001
Language:
english
Pages:
6
DOI:
10.1002/1521-3986(200107)41:43.0.co;2-#
File:
PDF, 145 KB
english, 2001