Direct ion flux measurements at high-pressure-depletion...

Journal of Applied Physics 2013 Vol. 114; Iss. 6

Direct ion flux measurements at high-pressure-depletion conditions for microcrystalline silicon deposition

Bronneberg, A. C., Kang, X., Palmans, J., Janssen, P. H. J., Lorne, T., Creatore, M., van de Sanden, M. C. M.
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Volume:
114
Year:
2013
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4817859
File:
PDF, 1.06 MB
english, 2013
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