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[IEEE 2010 IEEE International Conference on Semiconductor Electronics (ICSE) - Malacca, Malaysia (2010.06.28-2010.06.30)] 2010 IEEE International Conference on Semiconductor Electronics (ICSE2010) - Optimization of pull-in voltage and contact force for MEMS series switch using Taguchi method
Kshirsagar, Abhijeet, Apte, Prakash, Duttagupta, S. P., Gangal, S. A.Year:
2010
Language:
english
DOI:
10.1109/SMELEC.2010.5549363
File:
PDF, 767 KB
english, 2010