Solid state NMR investigation of photoresist molecular glasses including blend behavior with a photoacid generator
VanderHart, David L., Prabhu, Vivek M., De Silva, Anuja, Felix, Nelson M., Ober, Christopher K.Volume:
19
Year:
2009
Language:
english
Journal:
Journal of Materials Chemistry
DOI:
10.1039/B816290E
File:
PDF, 232 KB
english, 2009