Boron nitride growth on metal foil using solid sources

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 2013 Vol. 31; Iss. 4

Boron nitride growth on metal foil using solid sources

Suzuki, Satoru, Molto Pallares, Roger, Orofeo, Carlo M., Hibino, Hiroki
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Volume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4810965
File:
PDF, 4.78 MB
english, 2013
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