Micromachined piezoelectric force sensors based on PZT thin...

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 1996 / 07 Vol. 43; Iss. 4

Micromachined piezoelectric force sensors based on PZT thin films

Chengkuo Lee,, Itoh, T., Suga, T.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
43
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DOI:
10.1109/58.503715
Date:
July, 1996
File:
PDF, 989 KB
english, 1996
Conversion to is in progress
Conversion to is failed