100 mm 4HN-SiC Wafers with Zero Micropipe Density

Materials Science Forum 2009 Vol. 600-603

100 mm 4HN-SiC Wafers with Zero Micropipe Density

Leonard, R.T., Khlebnikov, Y., Powell, Adrian R., Basceri, C., Brady, M.F., Khlebnikov, I., Jenny, Jason R., Malta, D.P., Paisley, Michael J., Tsvetkov, Valeri F., Zilli, R., Deyneka, E., Hobgood, H.M
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Volume:
600-603
Year:
2009
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.600-603.7
File:
PDF, 1.41 MB
english, 2009
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