A mixed elastohydrodynamic lubrication model with layered...

A mixed elastohydrodynamic lubrication model with layered elastic theory for simulation of chemical mechanical polishing

Ping Zhou, Dongming Guo, Renke Kang…
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Volume:
69
Language:
english
DOI:
10.1007/s00170-013-5108-5
Date:
November, 2013
File:
PDF, 570 KB
english, 2013
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