Large-scale process optimization for focused ion beam 3-D...

The International Journal of Advanced Manufacturing Technology 2013 / 01 Vol. 64; Iss. 1-4

Large-scale process optimization for focused ion beam 3-D nanofabrication

Ruwen Qin, Jing Fu, Zhaozheng Yin…
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Volume:
64
Language:
english
DOI:
10.1007/s00170-012-4429-0
Date:
January, 2013
File:
PDF, 1.08 MB
english, 2013
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