Chemical vapor deposition experiments using new fluorinated...

Inorganic Chemistry 1989 / 07 Vol. 28; Iss. 14

Chemical vapor deposition experiments using new fluorinated acetylacetonates of calcium, strontium, and barium

Purdy, A. P., Berry, A. D., Holm, R. T., Fatemi, M., Gaskill, D. K.
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Volume:
28
Language:
english
Journal:
Inorganic Chemistry
DOI:
10.1021/ic00313a022
Date:
July, 1989
File:
PDF, 2.00 MB
english, 1989
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