Experimental evaluation and numerical modeling of adhesion...

Meccanica 2013 / 10 Vol. 48; Iss. 8

Experimental evaluation and numerical modeling of adhesion phenomena in polysilicon MEMS

Raffaele Ardito, Leonardo Baldasarre, Alberto Corigliano, Biagio De Masi…
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Volume:
48
Language:
english
DOI:
10.1007/s11012-013-9767-y
Date:
October, 2013
File:
PDF, 1.15 MB
english, 2013
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