Comparative composition analysis of SiOxand SiNxthin films...

Comparative composition analysis of SiOxand SiNxthin films by AES, EDX and RBS

I. Sieber, A. Schöpke, B. Selle
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Volume:
353
Language:
english
DOI:
10.1007/BF00321340
Date:
November, /
File:
PDF, 244 KB
english, /
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