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Magnetron sputtered Cu3N/NiTiCu shape memory thin film heterostructures for MEMS applications
Navjot Kaur, Nitin Choudhary, Rajendra N. Goyal…Volume:
15
Language:
english
DOI:
10.1007/s11051-013-1468-x
Date:
March, 2013
File:
PDF, 1.72 MB
english, 2013