Complex investigations of effects of charging a polymer...

Russian Microelectronics 2013 / 03 Vol. 42; Iss. 2

Complex investigations of effects of charging a polymer resist (PMMA) during electron lithography

E. I. Rau, E. N. Evstaf’eva, S. I. Zaitsev, M. A. Knyazev…
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Volume:
42
Language:
english
DOI:
10.1134/S1063739713020091
Date:
March, 2013
File:
PDF, 370 KB
english, 2013
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