Sulfur-doped black silicon formed by metal-assist chemical etching and ion implanting
Kong Liu, Shengchun Qu, Xinhui Zhang, Furui Tan, Yu Bi, Shudi Lu…Volume:
114
Language:
english
DOI:
10.1007/s00339-013-7682-7
Date:
March, 2014
File:
PDF, 613 KB
english, 2014