[IEEE 2005 IEEE International Frequency Control Symposium and Exposition, 2005. - Vancouver, BC, Canada (Aug. 29-31, 2005)] Proceedings of the 2005 IEEE International Frequency Control Symposium and Exposition, 2005. - Vibrating micromechanical resonators with solid dielectric capacitive transducer gaps
Yu-Wei Lin,, Sheng-Shian Li,, Yuan Xie,, Zeying Ren,, Nguyen, C.T.-C.Year:
2005
Language:
english
DOI:
10.1109/FREQ.2005.1573914
File:
PDF, 599 KB
english, 2005