Experiment and simulation of the compositional evolution of TiâB thin films deposited by sputtering of a compound target
Neidhardt, JoÌrg, MraÌz, Stanislav, Schneider, Jochen M., Strub, Erik, Bohne, Wolfgang, Liedke, Bartosz, MoÌller, Wolfhard, Mitterer, ChristianVolume:
104
Year:
2008
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2978211
File:
PDF, 835 KB
english, 2008