High bandwidth nano-positioner: A robust control approach

High bandwidth nano-positioner: A robust control approach

Salapaka, S., Sebastian, A., Cleveland, J. P., Salapaka, M. V.
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Volume:
73
Year:
2002
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1499533
File:
PDF, 755 KB
english, 2002
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