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Shear thickening and shear-induced agglomeration of chemical mechanical polishing slurries using electrolytes
Nathan C. Crawford, Benjamin Yohe, S. Kim, R. Williams, David Boldridge…Volume:
52
Language:
english
DOI:
10.1007/s00397-013-0711-9
Date:
May, 2013
File:
PDF, 696 KB
english, 2013