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Craters on silicon surfaces created by gas cluster ion impacts
Allen, L. P., Insepov, Z., Fenner, D. B., Santeufemio, C., Brooks, W., Jones, K. S., Yamada, I.Volume:
92
Year:
2002
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1506422
File:
PDF, 1.09 MB
english, 2002