DC reactive magnetron sputtered ZnO films
Tomonobu Hata, Toshiharu Minamikawa, Osamu Morimoto, Toshio HadaVolume:
47
Year:
1979
Language:
english
Pages:
6
DOI:
10.1016/0022-0248(79)90239-2
File:
PDF, 480 KB
english, 1979