One-step sculpting of silicon microstructures from pillars...

Journal of Micromechanics and Microengineering 2013 / 02 Vol. 23; Iss. 2

One-step sculpting of silicon microstructures from pillars to needles for water and oil repelling surfaces

Susarrey-Arce, A, Marín, Á G, Schlautmann, S, Lefferts, L, Gardeniers, J G E, van Houselt, A
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Volume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/2/025004
Date:
February, 2013
File:
PDF, 1.08 MB
english, 2013
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