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Microstructural defects in laser recrystallized, graphite strip heater recrystallized and buried oxide silicon-on-insulator systems: A status report
Russell F. PinizzottoVolume:
63
Year:
1983
Language:
english
Pages:
24
DOI:
10.1016/0022-0248(83)90168-9
File:
PDF, 2.65 MB
english, 1983