![](/img/cover-not-exists.png)
Integrated characterization of multilayer periodic systems with nanosized layers as applied to Mo/Si structures
G. A. Valkovskiy, M. V. Baidakova, P. N. Brunkov…Volume:
55
Language:
english
DOI:
10.1134/S1063783413030293
Date:
March, 2013
File:
PDF, 569 KB
english, 2013