Growth of polysilicon sheets on a carbon shaper by the RAD...

Growth of polysilicon sheets on a carbon shaper by the RAD process

C. Belouet, C. Texier-Hervo, M. Mautref, C. Belin, J. Paulin, J. Schneider

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Volume:

Year:

1983

Language:

english

Pages:

DOI:

10.1016/0022-0248(83)90190-2

File:

PDF, 1.89 MB

english, 1983

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