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Growth of polysilicon sheets on a carbon shaper by the RAD process
C. Belouet, C. Texier-Hervo, M. Mautref, C. Belin, J. Paulin, J. SchneiderVolume:
61
Year:
1983
Language:
english
Pages:
14
DOI:
10.1016/0022-0248(83)90190-2
File:
PDF, 1.89 MB
english, 1983