Localization of carbon atoms and extended defects in silicon implanted separately with C+and B+ions and jointly with C+and B+ions
M. Jadan, A. R. Chelyadinskii, V. B. OdzhaevVolume:
55
Language:
english
DOI:
10.1134/S1063783413020108
Date:
February, 2013
File:
PDF, 319 KB
english, 2013