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Effect of Resonant Radiation Transport on the Parameters of RF and DC Discharges in a He-Ar-Xe Mixture
S. A. Starostin, P. J. M. Peters, G. van der Poel, Yu. B. Udalov…Volume:
27
Language:
english
DOI:
10.1134/1.1371605
Date:
May, 2001
File:
PDF, 140 KB
english, 2001