Rutile TiO2 thin films grown by reactive high power impulse...

Thin Solid Films 2013 / 10 Vol. 545

Rutile TiO2 thin films grown by reactive high power impulse magnetron sputtering

Agnarsson, B., Magnus, F., Tryggvason, T.K., Ingason, A.S., Leosson, K., Olafsson, S., Gudmundsson, J.T.
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Volume:
545
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.07.058
Date:
October, 2013
File:
PDF, 1.89 MB
english, 2013
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