High temperature growth rate in MOCVD growth of AlGaAs

High temperature growth rate in MOCVD growth of AlGaAs

Tetsuo Soga, Yasuhito Takahashi, Shiro Sakai, Masayoshi Umeno
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Volume:
68
Year:
1984
Language:
english
Pages:
7
DOI:
10.1016/0022-0248(84)90413-5
File:
PDF, 570 KB
english, 1984
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