The formation of porous silicon by chemical stain etches
M.I.J. Beale, J.D. Benjamin, M.J. Uren, N.G. Chew, A.G. CullisVolume:
75
Year:
1986
Language:
english
Pages:
7
DOI:
10.1016/0022-0248(86)90082-5
File:
PDF, 871 KB
english, 1986