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Surface morphology of cubic SiC(100) grown on Si(100) by chemical vapor deposition
Kentaro Shibahara, Shigehiro Nishino, Hiroyuki MatsunamiVolume:
78
Year:
1986
Language:
english
Pages:
7
DOI:
10.1016/0022-0248(86)90158-2
File:
PDF, 736 KB
english, 1986