Effective defect entrainment in lamp zone melting of Si films on insulator
M. Haond, D. Dutartre, D. BensahelVolume:
79
Year:
1986
Language:
english
Pages:
5
DOI:
10.1016/0022-0248(86)90523-3
File:
PDF, 4.26 MB
english, 1986