Gas phase kinetics analysis and implications for silicon...

Journal of Crystal Growth 1988 Vol. 87; Iss. 4

Gas phase kinetics analysis and implications for silicon carbide chemical vapor deposition

C.D. Stinespring, J.C. Wormhoudt
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Volume:
87
Year:
1988
Language:
english
Pages:
13
DOI:
10.1016/0022-0248(88)90096-6
File:
PDF, 1.12 MB
english, 1988
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