Chemical vapour growth of β-SiC whiskers from a gas mixture...

Journal of Crystal Growth 1988 Vol. 87; Iss. 2-3

Chemical vapour growth of β-SiC whiskers from a gas mixture of Si2Cl6-CH4-H2-Ar

Seiji Motojima, Mitsutaka Hasegawa, Tatsuhiko Hattori
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Volume:
87
Year:
1988
Language:
english
Pages:
7
DOI:
10.1016/0022-0248(88)90181-9
File:
PDF, 648 KB
english, 1988
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