Growth of aluminium nitride pillar crystals by chemical vapour deposition
Hideaki Itoh, Hisashi Morikawa, Kohzoh SugiyamaVolume:
94
Year:
1989
Language:
english
Pages:
5
DOI:
10.1016/0022-0248(89)90013-4
File:
PDF, 614 KB
english, 1989