The Surface Modification with Fluorocarbon Thin Films for...

MRS Proceedings 1998 / 1 Vol. 518

The Surface Modification with Fluorocarbon Thin Films for the Prevention of Stiction in Mems

Lee, Sang-Ho, Kwon, Myong-Jong, Park, Jin-Goo, Kim, Yong-Kweon, Shin, Hyung-Jae
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Volume:
518
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-518-143
Date:
January, 1998
File:
PDF, 367 KB
english, 1998
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