Second-harmonic generation reveals the oxidation steps in semiconductor processing
Vanbel, M. K., Valev, V. K., Vincent, B., Afanasâev, V. V., Locquet, J.-P., Van Elshocht, S., Caymax, M., Verbiest, T.Volume:
111
Year:
2012
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3695989
File:
PDF, 1.72 MB
english, 2012