In situ cleaning of GaAs substrates with HCl gas and...

Journal of Crystal Growth 1989 Vol. 95; Iss. 1-4

In situ cleaning of GaAs substrates with HCl gas and hydrogen mixture prior to MBE growth

Junji Saito, Kazuo Nanbu, Tomonori Ishikawa, Kazuo Kondo
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Volume:
95
Year:
1989
Language:
english
Pages:
6
DOI:
10.1016/0022-0248(89)90410-7
File:
PDF, 508 KB
english, 1989
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