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Computed results for the deposition rates and transport phenomena for an MOCVD system with a conical rotating substrate
A.H. Dilawari, J. SzekelyVolume:
97
Year:
1989
Language:
english
Pages:
15
DOI:
10.1016/0022-0248(89)90582-4
File:
PDF, 1.08 MB
english, 1989