Piezoelectrically actuated dome-shaped diaphragm micropump
Guo-Hua Feng,, Eun Sok Kim,Volume:
14
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2004.839331
Date:
April, 2005
File:
PDF, 1.02 MB
english, 2005